Electron kinetics in capacitively coupled plasmas modulated by electron injection
نویسندگان
چکیده
منابع مشابه
High energy electron fluxes in dc-augmented capacitively coupled plasmas I. Fundamental characteristics
Power deposition from electrons in capacitively coupled plasmas CCPs has components from stochastic heating, Joule heating, and from the acceleration of secondary electrons through sheaths produced by ion, electron, or photon bombardment of electrodes. The sheath accelerated electrons can produce high energy beams which, in addition to producing excitation and ionization in the gas can penetrat...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2017
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.5001892